发明名称 SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要 <p>PURPOSE:To prevent an erroneous operation by grouping many commands and operation parameters when operating a semiconductor device according to the commands and the parameters, naming the groups, storing the names, and displaying them when the command is queued. CONSTITUTION:When a queue command from a command input processing portion is input in step S21, whether it is a command of execution level or not is judged in step S22. If it is the execution level, it is processed correspondingly. If not, the name of the group is judged in step S23 to display an error in step S24, and returned to the step S21. If the name of the group judged in the step S23 is to be executed, this data is displayed on a CRT in step S25, and transferred to an execution in next step S26. At this time, if the data are grouped according to the function of the execution command and the name, it is very effective to retrieve an unclear command and to prevent the erroneous operation in case of inputting a parameter.</p>
申请公布号 JPS6225418(A) 申请公布日期 1987.02.03
申请号 JP19850164799 申请日期 1985.07.25
申请人 CANON INC 发明人 SATO RYUICHI;NUMATA MASANORI;HAMAZAKI FUMIYOSHI;AYADA NAOKI
分类号 H01L21/30;G03F7/20;G03F7/22;G05B23/02;H01L21/02;H01L21/027 主分类号 H01L21/30
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