WAFER PROCESSING DEVICE FOR INTEGRATED CIRCUIT

摘要

PURPOSE:To obtain a processing device capable of mechanically moving without contaminating a wafer by using a rotating element so as to move a cassette within a SMIF canopy. CONSTITUTION:A cassette handler 300 consisting of a cassette knob means 31 for holding a cassette 330 and a wafer-pressurizing body 320 for inserting a wafer 20 into the cassette 330 is provided to move the cassette 330 containing wafers 20 within a canopy 40. The cassette handler 300 is mounted on the one end of 2 parallel arms 340 and moves the cassette 330 to a specified position with the rotating movement of the cassette handler 300 by means of the arms 340.