摘要 |
PURPOSE:To decrease the generation of defective working by chipping and to form a thin film magnetic head which obviates the stripping of a protective film and thin film transducer by using specific stabilized ZrO2 for a slider material. CONSTITUTION:A sintered body in which at least cubic ZrO2 occupies 90% volume ratio and which has <=5mum average crystal grain size and <=600ppm content of the chlorine incorporated therein is used for the slider material. Working resistance and work deformation increase and such material is disadvantageous if the ratio of the cubic crystal phase is less than the specified ratio in the case of the partially stabilized ZrO2. The sliding characteristic with a magnetic disk is poor if the ratio of the stabilized (cubic) ZrO2 is less than the specified ratio in the case of mixing other materials with the stabilized ZrO2. The chipping characteristic of the sintered body is thereby improved, by which the yield of working is improved and the thin film magnetic head is maintained in the normal state without the stripping of the protective film and the thin film transducer 2 for a long period of time. |