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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6224631(A)
申请公布日期
1987.02.02
申请号
JP19850162959
申请日期
1985.07.25
申请人
SONY CORP
发明人
HAYASHI HISAO;MORITA YASUSHI
分类号
H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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