| 摘要 |
PURPOSE:To make the intensity of a laser beam uniform extending over a wide range by reflecting and transmitting the laser beam which is emitted from a laser oscillator, by plural total reflecting mirrors. CONSTITUTION:At the time of an operation, a laser beam 2 which is emitted from a laser oscillator 1 is reflected and transmitted by a cylindrical convex face total reflecting mirror 7 and an optical axis is changed, also only one direction of the laser beam is expanded, and the beam is made incident on a cylindrical concave face total reflecting mirror 8. Next, by this cylindrical concave face total reflecting mirror 8, a laser beam 9 which is expanded in one direction is returned to parallel rays, and a laser beam 10 having a uniform intensity distribution is obtained. This laser beam 10 is irradiated to a mask plate 4, and an image of the mask plate 4 is formed on an object to be worked 6 by a lens 5. |
