| 摘要 |
PURPOSE:To enable a guide to be prevented from decreasing its straightness due to heat generation of a linear motor, by arranging the X-direction linear motor extending over two moving units on Y-guides while a Y-mover, being a constitutional element of the Y-direction linear motor, between the Y-guides. CONSTITUTION:A device, providing an X-stator 8A of an X-direction linear motor 8 extending over both moving units 3 between X-guides 5, 5, provides an X-mover 9, mounted to a table 6 through an intermediate member 10, to be arranged in said stator 8A, and the table 6 is driven in a direction X by the X-direction linear motor 8. While the device, mounting a Y-mover 12 of a Y-direction linear motor 13 to the bottom surface central part of the X-stator 8 through an intermediate member 11 and providing a Y-stator 13A between both Y-guides 2 on a fixed part 1,drives the table 6 in a direction Y through X-guides 7. In this way, the device obtains a table motion of high straightness with no decrease of straightness of the X-guides 5 even if the moving unit 3 is a little thermally deformed by heat generation of the movers 9, 12. |
