摘要 |
PURPOSE:To minimize a pressure loss by providing a heat exchanger, in which heat conducting plates are arranged along a flow of a laser medium gas at an inlet, on the inlet side of a circulation fan. CONSTITUTION:A heat exchanger 17 is provided with heat conducting plates 17a having the same length as the auxial length of the circulation fan and arranged radially to the shaft of the circulation fan, and a water cooling pipe 17b curved into arc and connected thermally with heat conducting plates. As the heat conducting plates 17a of the heat exchanger 17 are arranged along a flow of a laser medium gas at an inlet of the circulation fan, they do not prevent the gas flow. Accordingly, the influence upon the performance of the fan can be reduced and uniform low-temperature gas flow can be generated efficiently. |