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发明名称
TARGET FOR MAGNETRON SPUTTERING
摘要
申请公布号
JPS6223980(A)
申请公布日期
1987.01.31
申请号
JP19850163162
申请日期
1985.07.24
申请人
TOSHIBA CORP
发明人
OKUMURA KATSUYA
分类号
C23C14/36;C23C14/35;H01L21/203;H01L21/285;H01L21/31
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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