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经营范围
发明名称
TRANSFER DEVICE
摘要
申请公布号
JPS6221623(A)
申请公布日期
1987.01.30
申请号
JP19850158164
申请日期
1985.07.19
申请人
HITACHI LTD
发明人
MASUYAMA SHIGEJI
分类号
H01L21/677;B65G49/07;B65G51/03;H01L21/67;H01L21/68
主分类号
H01L21/677
代理机构
代理人
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地址
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