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发明名称
FORMING METHOD FOR RESIST PATTERN
摘要
申请公布号
JPS6222431(A)
申请公布日期
1987.01.30
申请号
JP19850160341
申请日期
1985.07.22
申请人
OKI ELECTRIC IND CO LTD
发明人
ITO YOSHIO;OTSUKA HIROSHI
分类号
G03F7/20;H01L21/027;H01L21/30
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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