Mfg. patterns for integrated circuits

摘要

Device for producing a pattern on a workpiece provided with a light sensitive layer consists of a beam divider (13) to break-up the beam into several beams connected optically to a laser (10); an acousto-optic modulator (16) which independently modulates each beam and is connected to the divider (13); and a rotating mirror (24) having several faces which reflects the beams onto a focussing device (26, 32) which in turn focusses the beams onto the workpiece (34).