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经营范围
发明名称
VAPOR-PHASE GROWING DEVICE
摘要
申请公布号
JPS6221231(A)
申请公布日期
1987.01.29
申请号
JP19850159883
申请日期
1985.07.19
申请人
FUJITSU LTD
发明人
MARUYAMA KENJI
分类号
H01L21/205;H01L21/365
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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