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发明名称
OXIDIZING DEVICE
摘要
申请公布号
JPS6221228(A)
申请公布日期
1987.01.29
申请号
JP19850159820
申请日期
1985.07.19
申请人
FUJITSU LTD
发明人
SHIMODA HARUO
分类号
H01L21/31;H01L21/316
主分类号
H01L21/31
代理机构
代理人
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地址
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