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发明名称
LIQUID-PHASE GROWTH DEVICE
摘要
申请公布号
JPS6221233(A)
申请公布日期
1987.01.29
申请号
JP19850159889
申请日期
1985.07.19
申请人
FUJITSU LTD
发明人
ITO MICHIHARU;HIROTA KOJI;MARUYAMA KENJI;YOSHIKAWA MITSUO
分类号
H01L21/208;H01L21/368
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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