| 摘要 |
PURPOSE:To provide the optical information recording thin film sufficiently capable of executing the recording and elimination of signal with laser beams, by a method wherein the thin film formed on a substrate contains Te, Ge, and Pd as necessary elements and the proportions of the number of atoms of respective elements are specified. CONSTITUTION:It is the recording thin film prepared by adding Pd for the purpose of improving the speed of crystallization to the stable amorphous Te-Ge thin film of about 40% max. in Ge atomic concentration. The thin film formed on the substrate contains Te, Ge, and Pd as necessary elements, and the proportions (%) of the number of atoms of respective elements Te, Ge, and Pd are respectively made to be x=50-90, y=5-25, and z=50-30 to be restricted by x+y+z=100. In a range of x=50-65 in Te proportion, the proportion of Ge y is almost selected from a range of 70-x<=y<=1/3(x+10). Further, in a range of x=65-70 in Te proportion, the proportion of Ge y is almost elected from all the range of y=5-25. In a range of x=70-90 in Te proportion, the proportion of Ge y is almost selected from a range of 5<=y<=95-x. |
