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发明名称
摘要
申请公布号	JPS6214451(U)	申请公布日期	1987.01.28
申请号	JP19850103565U	申请日期	1985.07.09
申请人		发明人
分类号	B08B17/02;G03F1/00;G03F1/64;H01L21/027;H01L21/30	主分类号	B08B17/02
代理机构		代理人
主权项
地址

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