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发明名称
METHOD AND DEVICE FOR INSPECTION
摘要
申请公布号
JPS6219739(A)
申请公布日期
1987.01.28
申请号
JP19850158153
申请日期
1985.07.19
申请人
HITACHI LTD
发明人
TANABE YOSHIKAZU
分类号
G01N21/88;G01N21/94;G01N21/956;H01L21/66
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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