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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6220364(A)
申请公布日期
1987.01.28
申请号
JP19850158195
申请日期
1985.07.19
申请人
HITACHI LTD
发明人
YANO KAZUO;AOKI MASAAKI;MASUHARA TOSHIAKI;KURE TOKUO
分类号
H01L21/8238;H01L27/08;H01L27/092;H01L29/78
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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