| 摘要 |
PURPOSE:To accomplish in succession the processes of baking, cooling and descum disposition for an improved through-put by a method wherein a vacuum chamber, hot plate, temperature controlling panel, walking beam type transport means, descumming means, temperature detecting means, and descumming controlling means are provided. CONSTITUTION:A hot plate 6 is installed in a chamber 1 and the upper surface of the hot plate 6 where on a substrate is set is positioned to face a feed port 2. In the chamber 1, a temperature controlling plate 7 is located apart from the hot plate 6 by a prescribed distance. It is so arranged that the upper surface of the temperature controlling plate 7 is positioned lower than the upper surface of the hot plate 6. A walking beam 8, constituted of a pair of beam-shaped rails, is driven upward, forward, downward, or backward for the substrate on the hot plate 6 to be transported to a position over the temperature controlling plate 7. A control circuit 12 turns on a high-frequency power source 10 upon reaching a preset level of temperature as sensed by a temperature sensors 11a and 11b and, further yields a signal which causes the power source 10 to stay in operation for a time period subject to the preset temperature. |
