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发明名称
SEMICONDUCTOR PROCESSOR
摘要
申请公布号
JPS6218727(A)
申请公布日期
1987.01.27
申请号
JP19850158787
申请日期
1985.07.18
申请人
TOKUDA SEISAKUSHO LTD
发明人
TOKURA TSUNEMASA
分类号
H01L21/683;B23Q3/15;H01L21/67;H01L21/68
主分类号
H01L21/683
代理机构
代理人
主权项
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