OXIDIZING DEVICE FOR SEMICONDUCTOR WAFER,申请号JP19850156056-传众专利搜索

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法人/股东/高管

发明名称	OXIDIZING DEVICE FOR SEMICONDUCTOR WAFER
摘要
申请公布号	JPS6218039(A)	申请公布日期	1987.01.27
申请号	JP19850156056	申请日期	1985.07.17
申请人	TDK CORP	发明人	SASAKI YOSHITAKA
分类号	H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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