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经营范围
发明名称
ION BEAM ETCHING EQUIPMENT
摘要
申请公布号
JPS6218031(A)
申请公布日期
1987.01.27
申请号
JP19850156115
申请日期
1985.07.17
申请人
CANON INC
发明人
SATO YASUE
分类号
H01L21/302;C23F1/08;C23F4/00;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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