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发明名称
PASS-THROUGH ROOM
摘要
申请公布号
JPS6218037(A)
申请公布日期
1987.01.27
申请号
JP19850156014
申请日期
1985.07.17
申请人
WAKOMU:KK
发明人
KUSUHARA MASAKI
分类号
B08B3/08;H01L21/304;H01L21/67;H01L21/677;H01L21/68
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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