METHOD AND DEVICE FOR TEMPERATURE COMPENSATION OF PIEZOELECTRIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a control device for compensating the temperature of a piezoelectric element. SOLUTION: This control device includes a temperature compensation circuit which can receive a control signal corresponding to a desired position of the piezoelectric element, and compensates the control signal according to an estimated temperature in the vicinity of the piezoelectric element. A piezoelectric control circuit receives a temperature compensation control signal and can form a control signal for driving the element to a desired position. The temperature in the vicinity of the element can be estimated from ferroelectric polarization of the element or from a temperature sensor.