| 摘要 |
PURPOSE:To improve heat radiation efficiency and avoid deterioration with a simple constitution by providing apertures at least in an insulation film formed on a resistor for input protection. CONSTITUTION:A polycrystalline silicon resistor 18 is provided on a field oxide film 12. Required specific resistivity of the resistor 18 is obtained by doping impurity as necessary and the dimension of the resistor 18 is so selected as to establish a required resistance value. The first silicon oxide film 20 and the second silicon oxide film 21 are formed on a substrate 11 including the field oxide film 12 as insulation films. An aperture 22 is formed in the oxide films 20 and 21 above the resistor 18. An aperture is drilled in the part of the second silicon oxide film 21 and a bonding pad 24 made of Al is provided on the first silicon oxide film 20 directly under the aperture part (window) 23. With this constitution, the heat generated by the resistor 18 can be discharged out of the chip. |
