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发明名称
GROWTH METHOD OF COMPOUND SEMICONDUCTOR SINGLE CRYSTAL AND QUARTZ AMPULE USED THEREFOR
摘要
申请公布号
JPS6217095(A)
申请公布日期
1987.01.26
申请号
JP19850154115
申请日期
1985.07.15
申请人
NEC CORP
发明人
FUJINO YOSHIO
分类号
C30B11/00;C30B11/02;H01L21/18;H01L21/208
主分类号
C30B11/00
代理机构
代理人
主权项
地址
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