| 摘要 |
PURPOSE:To enable realization of high-output and stable oscillation in the single 0 deg. phase mode, by providing a plurality of first active waveguides optically coupled together and a second wave guide intersecting them at a predetermined angle and optically coupling the first and second waveguides by means of a periodic structure having a period substantially equal to the wavelength. CONSTITUTION:A plurality of first active waveguides 28 optically coupled together and a single or plurality of second active or inactive waveguides 29 intersecing the first active waveguides 28 are provided. The first and second waveguides 28 and 29 are optically coupled together by means of a periodic structure having a period substantially equal to or less than the wavelength. For example, an N-AlGaAs clad layer 22 is formed on the (001) face of an N-GaAs substrate 21, and a grating 23 is formed on the surface of the clad layer 22 in parallel to the <010> direction of the crystal. Then, an N-AlGaAs optical waveguide 24, a P-AlGaAs active layer 25, a P-AlGaAs clad layer 26 and an N<+>-GaAs contact layer 27 are grown. An electrode material is deposited on both surfaces by evaporation and alloyed. Thereafter, mesa stripe active waveguides 28 and 29 extending in two different directions so as to intersect each other are formed. |
