| 摘要 |
PURPOSE:To prevent the uneven wear of a thin film magnetic head by using a compd. of MgO and SiO2 which is limited in the range of component compsn. to form a protective film for the above-mentioned head. CONSTITUTION:Films of a core material for magnetic cores 21, 22, a gap material 4, conductors to be formed as signal coils 31, etc. are successively formed on a substrate 1 polished to a specular surface and are repeatedly etched until the films are patterned to prescribed shapes. The protective film 5 is finally formed to complete the thin film magnetic head. The protective film 5 is formed of the compd. of MgO and SiO2, by which the m.p. is decreased and the adequate hardness and coefft. of thermal expansion are provided. The film for the core material consisting of a Co-Nb amorphous alloy can be formed by mixing SiO2 at 10-70% concn. therewith and at 10-60% in the case of 'Sendust(R)'. The uneven wear of the head is prevented by using such protective film. |
