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发明名称
PROJECTION EXPOSURE APPARATUS
摘要
申请公布号
JPS6216526(A)
申请公布日期
1987.01.24
申请号
JP19850155349
申请日期
1985.07.15
申请人
CANON INC
发明人
TORIGOE MAKOTO;SATO HIROSHI
分类号
H01L21/30;G03F7/20;H01L21/027
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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