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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6216521(A)
申请公布日期
1987.01.24
申请号
JP19850155461
申请日期
1985.07.15
申请人
MATSUSHITA ELECTRONICS CORP
发明人
TAKEBAYASHI TAKAMICHI;KANBARA GINJIRO
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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