| 摘要 |
PURPOSE: A chemical liquid supplying pump for fabricating a semiconductor is provided to control a process defect occurring in a semiconductor fabricating process like a developing process, by uniformly supplying chemical liquid while varying the chemical liquid according to a stroke distance of a bellows tube and by supplying the chemical liquid to a wafer after fine bubbles included in the chemical liquid is eliminated. CONSTITUTION: An induction valve(14) is connected to a pipe of a chemical liquid supplying tank. An exhaust valve(15) is connected to a pipe of the wafer. The induction valve and the exhaust valve are installed in a casing. The chemical liquid is induced through the induction valve and is stored in the bellows tube(18) in a contraction. The stored chemical liquid is exhausted through the exhaust valve in expansion. The bellows tube is installed inside the casing. A driving cylinder(19) expands or contracts the bellows tube, installed in the lower portion of the bellows tube.
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