发明名称 THIN FILM TRANSISTOR ARRAY MANUFACTURE
摘要 Thin film transistor arrays are prepared by a vacuum deposition technique wherein only a single deposition of discrete areas of an insulating material are deposited through a mask. No registration is required to form the various elements of the transistors. A unique structure is described wherein the contact of the semiconductor material with the source electrode, the source bus conductors, and the drain electrode is coterminous with conductive material forming the source electrode and bus conductors and the drain electrode.
申请公布号 DE3175715(D1) 申请公布日期 1987.01.22
申请号 DE19813175715 申请日期 1981.10.21
申请人 XEROX CORPORATION 发明人 LUO, FANG CHEN
分类号 H01L29/78;G02F1/136;G02F1/1368;H01L21/336;H01L21/768;H01L21/77;H01L21/84;H01L23/522;H01L27/12;H01L29/786;(IPC1-7):H01L21/84 主分类号 H01L29/78
代理机构 代理人
主权项
地址