MANUFACTURE OF SILICON NITRIDE THIN FILM,申请号JP19850150748-传众专利搜索

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发明名称	MANUFACTURE OF SILICON NITRIDE THIN FILM
摘要
申请公布号	JPS6212136(A)	申请公布日期	1987.01.21
申请号	JP19850150748	申请日期	1985.07.09
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	MITSUYU TSUNEO;MANABE YOSHIO;YAMAZAKI OSAMU
分类号	H01L21/318	主分类号	H01L21/318
代理机构		代理人
主权项
地址

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