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发明名称
MOLECULAR BEAM EPITAXIAL GROWTH APPARATUS
摘要
申请公布号
JPS6212694(A)
申请公布日期
1987.01.21
申请号
JP19850151490
申请日期
1985.07.10
申请人
ANELVA CORP
发明人
MURAKAMI SHUNICHI;ISHIDA TETSUO;SAKAI SUMIO
分类号
C30B23/08;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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