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发明名称
INTEGRATED CIRCUIT TEST
摘要
申请公布号
JPS6213046(A)
申请公布日期
1987.01.21
申请号
JP19860156390
申请日期
1986.07.04
申请人
ITT CORP
发明人
GIYARII REIMONDO ADAMUSU
分类号
H01L21/66;G01R31/308;G01R31/319;H01L21/822;H01L27/04
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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