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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6212125(A)
申请公布日期
1987.01.21
申请号
JP19850151535
申请日期
1985.07.10
申请人
FUJITSU LTD
发明人
EMA YASUJI
分类号
H01L29/78;H01L21/28;H01L21/285;H01L21/74;H01L21/768;H01L21/8244;H01L23/522
主分类号
H01L29/78
代理机构
代理人
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地址
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