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发明名称
TREATMENT OF CRUCIBLE
摘要
申请公布号
JPS6212695(A)
申请公布日期
1987.01.21
申请号
JP19850153206
申请日期
1985.07.10
申请人
NEC CORP
发明人
SHIMURA AKIO;MATSUMURA TAKAO
分类号
C30B15/10;C30B27/02;H01L21/18;H01L21/208
主分类号
C30B15/10
代理机构
代理人
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