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经营范围
发明名称
RESIST COATING METHOD
摘要
申请公布号
JPS6213029(A)
申请公布日期
1987.01.21
申请号
JP19850153429
申请日期
1985.07.10
申请人
MITSUBISHI ELECTRIC CORP
发明人
HOSHIKA HARUYUKI;NISHIHATA MIKIO
分类号
H01L21/027;B05D1/40;B05D3/04;G03F7/16;H01L21/30
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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