WAFER HOLDING BOAT,申请号JP19850153436-传众专利搜索

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法人/股东/高管

发明名称	WAFER HOLDING BOAT
摘要
申请公布号	JPS6213023(A)	申请公布日期	1987.01.21
申请号	JP19850153436	申请日期	1985.07.10
申请人	MITSUBISHI ELECTRIC CORP	发明人	HASHIZUME TSUNEO
分类号	H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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