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经营范围
发明名称
SCANNING TYPE ELECTRON MICROSCOPE
摘要
申请公布号
JPS6212044(A)
申请公布日期
1987.01.21
申请号
JP19850150238
申请日期
1985.07.10
申请人
HITACHI LTD
发明人
KAGEYAMA KASHIO
分类号
H01J37/02;H01J37/28
主分类号
H01J37/02
代理机构
代理人
主权项
地址
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