FORMATION OF CU THIN FILM ON QUARTZ SUBSTRATE,申请号JP19850151158-传众专利搜索

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发明名称	FORMATION OF CU THIN FILM ON QUARTZ SUBSTRATE
摘要
申请公布号	JPS6212185(A)	申请公布日期	1987.01.21
申请号	JP19850151158	申请日期	1985.07.09
申请人	TANAKA KIKINZOKU KOGYO KK	发明人	MORI KENYA
分类号	C23C14/18;C03C17/40;C23C14/14;H05K3/16	主分类号	C23C14/18
代理机构		代理人
主权项
地址

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