| 摘要 |
PURPOSE:To efficiently perform visual inspection, by storing the positional information of foreign matter detected on the basis of reflected light and the information of a visual observation result in the table on a memory so as to allow both informations to respectively correspond to the foreign matter. CONSTITUTION:A microprocessor 120 indicates the start of scanning to a motor controller 116 through an interface circuit 108 and drives a stepping motor 14 and a DC motor 24. Then, results by scanning, such as the number, position, kind, property, size, etc. of foreign matter are written in the table 124D on RAM124. By indicating the number of the foreign matter written in RAM124, the positional information thereof is read and an article to be inspected is moved so that the indicated foreign matter enters the visual field of a microscope. Further, a visual observation result is written in RAM124 so as to correspond to the number of the foreign matter. |
