| 摘要 |
PURPOSE:To prevent the backflow of organic metal into a pipeline of an apparatus by communicating mutually the dipping tubes which are incorporated in two comparted chambers in the position at least higher than the liquid level of organic metal to be packed in a vessel. CONSTITUTION:When a bubbler vessel main body 11 of organic metal is connected to a pipeline of an apparatus and the pressure of an inlet side is made lower than the pressure of an outlet side, organic metal 6 transfers to a chamber A from a chamber B but is not back-flowed into the pipeline of the upper part through a valve 5A of the chamber A and collects in the bottom of the chamber A. Again when the pressure of the inlet side is made higher than the pressure of the outlet side, organic metal returns to the chamber B through the dipping tubes 3A, 3B. In this case, several organic metal 6 remains in the chamber A but when the distance between the tip of the dipping tube 3A and the bottom of the vessel is made extremely small, the remaining amount is a very small quantity and is accompanied with the flow of a carrier gas in the ordinary operation and this is made to vapor and disappears for a short time. |
