INCLINED TRANSFER LINE SCANNING INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To simplify the process for inspecting a glass substrate used for a flat-panel display, and to enhance inspection accuracy and inspection speed. SOLUTION: The inclined transfer line scanning inspection method determines defects on the glass substrate, by performing comparison processings among the gray values of pixels obtained by line scanning of the glass substrate transferred with inclination, the threshold of sensitivity of the hardware, and the threshold of the inspection sensitivity. COPYRIGHT: (C)2005,JPO&NCIPI