EVALUATION SPECIMEN FOR SURFACE INSPECTION APPARATUS

摘要

PURPOSE:To accurately calibrate a surface inspection apparatus, by adhering standard particles having the same particle size subjected to diffusion averaging to the specific surface area of a clean specimen plate so as to be capable of discriminating an adhered part and a non-adhered part. CONSTITUTION:Standard particles having the same particle size subjected to diffusion averaging are adhered to the specific surface area of a clean specimen plate 2 so as to be capable of discriminate an adhered part and a non-adhered part. By this method, the shape of the standard particles can be allowed to correspond to the shape of a minute flaw such as actual dust and the quantities of reflected lights therefrom become almost equal. Therefore, the peak value of the signal detecting the standard particles can be accurately compared with that of the signal detecting actual dust particles with correlation. As a result, a surface inspection apparatus can be accurately calibrated by using an evaluation specimen 5.