| 摘要 |
PURPOSE:To peform the cleaning of the surface of an article to be inspected, by spraying the jet stream of clean air to the surface of the article to be inspected and forming the flow of the clean gas around the article to be inspected. CONSTITUTION:A blower 52 takes in the open air and suspended foreign matter is removed from the open air by the dust-proof filter in said blower 52 to form clean air which is, in turn, sent into the ionization apparatus 54 arranged in the forward direction. This ionization apparatus 54 ionizes sent-in air and emits ionized air to the side of a rotary stage 22. An exhaust duct 56 is arranged in opposed relation to the ionization apparatus 54 through the rotary stage 22. By this constitution, the flow of clean air ionized and having received dust- proof treatment, pref., a laminar stream is formed around the rotary stage accordingly around the wafer 30 set to the rotary stage 22. |
