发明名称 |
Ion beam generating apparatus |
摘要 |
An ion beam generating apparatus is used together with a vacuum chamber. The ion beam generating apparatus has an anode assembly arranged inside the vacuum chamber, a gas supply mechanism for supplying a gas into the vicinity of the anode assembly, a temperature control mechanism for controlling a temperature of an apex of the anode assembly, and a cooling mechanism for cooling at least part of the anode assembly.
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申请公布号 |
US4638209(A) |
申请公布日期 |
1987.01.20 |
申请号 |
US19840646438 |
申请日期 |
1984.09.04 |
申请人 |
ANELVA CORPORATION |
发明人 |
ASAMAKI, TATSUO;KATO, TAKAO |
分类号 |
G21K1/00;H01J3/04;H01J27/26;H01J37/08;(IPC1-7):H01J37/08 |
主分类号 |
G21K1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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