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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS629627(A)
申请公布日期
1987.01.17
申请号
JP19850148533
申请日期
1985.07.06
申请人
SONY CORP
发明人
SEKIYA MITSUNOBU;SAMEJIMA TOSHIYUKI;USUI SETSUO
分类号
H01L21/225
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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