| 摘要 |
PURPOSE:To simplify the wirings of a pressure sensitive sensor as compared with the case that unit cells have full bridges by providing halves of strain gauge region for forming bridges for detecting 3 components of a force in a pressure sensitive structure of two unit cells. CONSTITUTION:Two strain gauge regions 21 for detecting Fz, two strain gauge regions 22 for detecting Fx and two strain gauge regions 23 for detecting Fy are disposed on the surface 12 of a pressure sensitive structure 1 of unit cells. When two such cells are used to form full bridges for detecting Fx, Fy, Fz, the irregular force in the two unit cells can be compensated. The wirings 5 in the structure are extremely simplified as compared with the wirings 5 of the conventional pressure sensitive structure, and crossovers of problems at the point of the reliability requiring the number of manufacturing steps can be eliminated. |
