| 摘要 |
PURPOSE:To prevent dew condensation even if the heating part in a laser oscillator is cooled with a cooling means in a cabinet, by replacing air by a dry gas in the cabinet, and performing operation. CONSTITUTION:In a cabinet 1, a dry gas inlet port 6 and a dry gas outlet port 8 are provided. At the outside of the cabinet 1, a dry gas feeding device 10, which feeds a dry gas to the inlet port 6, is provided. At first, before the oscillator is started, the device 10 is started, and valves 7 and 9 are opened. Air in the cabinet 1 is replaced by the dry gas, e.g., by dry air. Thereafter, a cooling means 3 and the laser oscillator 2 are started. Thus dew condensation in the cabinet 1 is prevented. |
